sicn

sicn

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• 网络碳氮；三元材料；碳氮化硅

例句

In this paper, we study the bonds structure and properties of the SiCN thin films affected by different sputtering conditions.

本文研究了SiCN薄膜的结构和化学组分及其对薄膜性能的影响。

The SiCN thin films are prepared by twined charge chamber microwave ECR plasma enhanced unbalanced magnetron sputtering system.

本文采用大连工大学三束实验室自主研发的双放电腔微波-ECR等离子体增强非平衡磁控溅射系统制备了SiCN薄膜。